产品类型Mass Flow Controller
区别
NEMA 4X/IP66 Approved Enclosure
Perfect for Hose Down/Wash Down Applications
Hazardous Area Approvals
性能
流量范围-满量程容量.003 - 2500 slpm
精度
17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)
±0.6% of SP (20-100% FS)
±0.12% of FS (<20% FS)
1100 slpm up to 2500 slpm: ±0.6% of FS
Standard Devices (includes uncertainty from reference standards
±0.9% of SP (20-100% FS)
±0.18% of FS (2-20% FS)
1100 slpm up to 2500 slpm: ±1.0% of FS
重复性
0.20% SP
线性
Included in Accuracy
响应时间-常闭
<1 second up to 100 lpm
<3 seconds up to 2500 lpm
多气体多量程
Standard
最大压力
Up to 100 lpm: 1500 psi/100 bar
Up to 50 lpm: 4500psi/310 bar (optional)
100-2500 lpm: 1000 psi/70 bar
控制范围
1-50 slpm: 100:1 Turndown for F.S.
50-2500 lpm: 50:1 Turndown for F.S.
零点稳定性
< 0.2% F.S. per year
温度系数
Zero: <0.05% of F.S. per °C
Span: < 0.1% of S.P. per °C
压力系数
±0.03% per psi (0-200 psi N2)
灵敏度
<0.2% F.S. maximum deviation from specified accuracy after re-zeroing
等级
最大温度65oC
压差范围
Controllers
Up to 50 lpm: 5 psi/0.35 bar min - 1500 psi/103.4 bar max
50-100 lpm: 10 psi/0.69 bar min - 50 psi/3.45 bar max
500 lpm: 7.5 psi/0.52 bar min - 300 psi/20.0 bar max
1000 lpm: 14.5 psi/1.00 bar min - 300 psi/20.0 bar max
2500 lpm: 35.0 psi/2.41 bar min - 300 psi/20.0 bar max
漏率1x10-9 atm cc/sec He
机械
密封材料Elastomer Seal
接液材料
316L Stainless Steel
High Alloy Stainless Steel
Viton® Fluoroelastomers
Buna-N
Kalrez®
Teflon®/Kalrez®
EPDM
阀门
Normally Closed
Normally Open
Meter (no valve)
诊断
诊断能力Available
状态灯
MFC Health, Network Status
报警
Sensor Output
Control Valve Output
Over Temperature
Power Surge/Sag
Network Interruption
诊断/服务端口
RS485 via 2.5mm jack
电气
模拟通讯0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA
数字通讯DeviceNet™
EtherNet/IP™
FOUNDATIONTM Fieldbus
Profibus®
PROFINET
RS-485
电气连接
DeviceNet™: 1 x M12 with threaded coupling nut (B)
Profibus®: 1 x 15-pin Male Sub-D
1 x 9-pin female Sub-D
RS485: 1 x 15-pin Male Sub-D, (A)
电源-功耗
Analog / Profibus® / RS-485
Valve Orifice > 0.032": 8 Watts
Valve Orifice ≤ 0.032": 5 Watts
Without Valve: 2 Watts
DeviceNet™
Valve Orifice > 0.032": 10 Watts
Valve Orifice ≤ 0.032": 7 Watts
Without Valve: 4 Watts
承诺
认证和批准
ISO/IEC 17025:2005
CE: EMC, RoHs, PED
UL Listed/Recognized:
Class 1, Div 2, Group A,B,C,D
Class 1, Zone 2, IIC T4, Class II, Zone 22
ATEX:
II 3 G Ex nA IIC T4 Gc
II 3 D Ex tc IIIC T 85°C Dc
IECEx:
Ex nA IIC T4 Gc
Ex tc IIIC T 85°C Dc
KOSHA:
Ex nA IIC T4
Ex tc IIIC T85°C Dc
符合环保要求
RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006
大小Large