美国mks流量计-GE50A015103S5V020流量计-美国mks流量计控制器

GE50A质量流量控制器

GE50A是一种通用型弹性密封的质量流量控制器，可在多种应用场合测量和控制气体的流量，特别是可重复性要求高的场合。配上合适的压力控制器，它还可以作为压力控制器使用。
对于当今市场上的质量流量控制器，GE50A可作为直接替代的产品，标准的3英寸底座使GE50A能够直接进行安装而无需改变现有的气体管道。它具有数字和模拟两种模式，其精度为全量程的1%。

美国mks流量计技术参数：

全量程：10SCCM，20SCCM，50SCCM，100SCCM，200SCCM，500SCCM，1000SCCM，2000SCCM，5000SCCM，10000SCCM，20000SCCM。
控制量程：2% to 100%的全量程。
测量精度：全量程的1%
灵敏度：全量程的0.1%
热机时间：小于2Min.
响应速度：小于2Sec.
输入电压：±15VDC@100ma
输出电压：0-5VDC
连接器：模拟：9Pin或15Pin或20Pin Card edge.
数字：RS485或Device net或Profibus
法兰接口：Swagelok 4VCR，Swagelok4 VCO，Swage 1/4”等
材质：316不锈钢。
质保期：有限保修自售出之日起12个月。

例：型号1179A00411CR1A5VXX                                                    采购序列号


校准气体（SEMI气体编号）*
Helium, He                                                        001
Argon, Ar                                                          004
Hydrogen, H2                                                    007
Nitrogen, N2                                                      013
Oxygen, O2                                                       015


校准流量SCCM－最大20000（相当氮气）                                              
10                                                                                                             11C                     
20                                                                                                             21C                    
50                                                                                                             51C                    
100                                                                                                           12C                    
200                                                                                                           22C                    
500                                                                                                           52C                    
1000                                                                                                         13C                    
2000                                                                                                         23C                    
5000                                                                                                         53C                    
10000                                                                                                       14C                    
20000                                                                                                       24C                    

装配件（与以下兼容）
标配：（兼容）SwagelokR4VCRR凸接头                                              R                        
选配：（兼容）SwagelokR4VCOR凸接头                                              G                        
选配：（兼容）SwagelokR0.25英寸管                                                    S                        
长度适配器 w/ 4 VCR配件**                                                                      L        
长度适配器w/ 1/4" Swagelok配件***                                                         W